A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications

TitleA Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications
Publication TypeJournal Article
Year of Publication2020
AuthorsWang, D., S. J. Koppal, and H. Xie
JournalJournal of Microelectromechanical Systems
Pagination1 - 6
Date PublishedJan-01-2020
ISSN1057-7157
URLhttps://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=84https://ieeexplore.ieee.org/document/9123864/http://xplorestaging.ieee.org/ielx7/84/4357932/09123864.pdf?arnumber=9123864
DOI10.1109/JMEMS.8410.1109/JMEMS.2020.3001921
Short TitleJ. Microelectromech. Syst.