Congratulations to UF ECE and IMG Ph.D. student Tahmid Kaisar, S M Enamul Haque Yousuf, and Prof. Philip Feng, and their collaborators (Dr. Mina Rais-Zadeh at NASA JPL, and Dr. Soumyajit Mandal at Brookhaven National Lab), on their recent journal publication in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, titled “Five Low-Noise Stable Oscillators Referenced to the Same Multimode AlN/Si MEMS Resonator.” Read the paper here: https://doi.org/10.1109/TUFFC.2023.3312159.
In this paper, the authors report on the first experimental demonstration of five self-sustaining feedback oscillators referenced to a single multimode resonator, using piezoelectric aluminum nitride on silicon (AlN/Si) microelectromechanical systems (MEMS) technology. Integrated piezoelectric transduction enables efficient readout of five resonance modes of the same AlN/Si MEMS resonator, at 10MHz, 30MHz, 65MHz, 95MHz, and 233MHz with quality (Q) factors of 18600, 4350, 4230, 2630, and 2138, respectively. Five stable self-sustaining oscillators are built, each referenced to one of these high- Q modes, and their mode-dependent phase noise and frequency stability (Allan deviation) are measured and analyzed. The five oscillators’ overall promising performance also suggests suitability for multimode resonant sensing and tracking. This work elucidates mode dependency in oscillator noise and stability, one of the key attributes of mode-engineerable resonators.
